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	<title>Techno and Science Blog &#187; plasma ald</title>
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		<title>Benefit of employing plasma ALD</title>
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		<pubDate>Fri, 15 May 2009 06:48:38 +0000</pubDate>
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				<category><![CDATA[Techno Corner]]></category>
		<category><![CDATA[plasma ald]]></category>

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		<description><![CDATA[With the introduction of a phase at low temperature plasma in a cycle of reaction of ALD, it is possible the reactivity of the additional area in the form of plasma product types. This allows ALD are at a level even broader application by improving the quality of the film, including lower temperatures, and it [...]


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